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2010-07-11 - Colloque/Présentation - poster - Anglais - 2 page(s)

Zhang Chao, Boudiba Abdelhamid , Navio Bernabeu Cristina, Bittencourt Carla , Snyders Rony , Debliquy Marc , "Sensing Characteristics of Radio Frequency Co-sputtered Pt Activated WO3 Films for H2 Detection" in 13th International Meeting on Chemical Sensors, Perth, Australia, 2010

  • Codes CREF : Capteurs et périphériques (DI2563)
  • Unités de recherche UMONS : Chimie des interactions plasma-surface (S882), Science des Matériaux (F502)
  • Instituts UMONS : Institut de Recherche en Science et Ingénierie des Matériaux (Matériaux)
  • Centres UMONS : Centre d’Innovation et de Recherche en Matériaux Polymères (CIRMAP), Ingénierie des matériaux (CRIM)

Abstract(s) :

(Anglais) Pt activated WO3 films for highly sensitive H2 sensors were co-deposited by radio frequency (r.f.) sputtering with heat-treatments. A small Pt target and a relatively big WO3 target were used for simultaneous r.f. sputtering. The as-sputtered Pt-WO3 films were annealed at 700°C for 1h plus a heat-treatment of 450°C for 0, 6, 12, 24 or 48h. The heat-treated Pt-WO3 films were submitted to 30-200ppm H2 and other reducing gases in moist air. The sensor based on Pt-WO3 films showed a high sensitivity and good selectivity to H2 at 200°C. The influences of heat-treatment time and Pt content on the sensing characteristics of Pt-WO3 films were investigated.