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2014-05-14 - Article/Dans un journal avec peer-review - Anglais - 46 page(s)

Britun Nikolay , Minea Tiberiu, Konstantinidis Stéphanos , Snyders Rony , "Plasma diagnostics for understanding the plasma–surface interaction in HiPIMS discharges: a review" in Journal of Physics: D Applied Physics, 47, 224001

  • Edition : Institute of Physics Publishing, Bristol (United Kingdom)
  • Codes CREF : Spectroscopie [électromagnétisme, optique, acoustique] (DI1255), Physique des plasmas (DI1233), Sciences exactes et naturelles (DI1000)
  • Unités de recherche UMONS : Chimie des interactions plasma-surface (S882)
  • Instituts UMONS : Institut de Recherche en Science et Ingénierie des Matériaux (Matériaux)
Texte intégral :

Abstract(s) :

(Anglais) The physical and chemical aspects of plasma–surface interaction in high-power impulse magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various plasma diagnostic methods representing the important sputtering discharge regions, namely the cathode vicinity, plasma bulk, and substrate vicinity, are reported. After a detailed introduction to the problem and description of the plasma characterization methods suitable for pulsed magnetron discharge analysis, an overview of the recent plasma diagnostics achievements in both non-reactive and reactive HiPIMS discharges is presented. Finally, the conclusions and perspectives suggesting possible directions and research strategies for increasing our knowledge in this domain are given.