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2010-12-09 - Colloque/Présentation - poster - Anglais - 1 page(s)

Balhamri Adil, Konstantinidis Stéphanos , Cormier P.A, Thomann AL, Snyders Rony , "Direct Measurement of the Energy Flux on the substrate during the growth of Titanium Oxide thin films by DC and High-Power Impulse Magnetron Sputtering" in Ninth International Conference on Reactive Sputter Deposition 2010 - RSD2010, Gent, Belgique, 2010

  • Codes CREF : Chimie des surfaces et des interfaces (DI1327)

Abstract(s) :

(Anglais) Direct Measurement of the Energy Flux on the substrate during the growth of Titanium Oxide thin films by DC and High-Power Impulse Magnetron Sputtering