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2009-11-16 - Colloque/Article dans les actes sans comité de lecture - Anglais - 8 page(s)

Basile Natanaël , Gonon Maurice , Petit Fabrice, Cambier Francis, "SELECTIVE LASER HEAT TREATMENTS FOR REALIZING COATINGS AND THIN ELECTRIC COMPONENTS - PART 2: SINTERING OF BATIO3 BY SLS (SELECTIVE LASER SINTERING)" in Fourth International Conference on Shaping of Advanced Ceramics, Madrid, Spain, 2009

  • Codes CREF : Sciences de l'ingénieur (DI2000), Lasers (DI125A), Technologie de la production (DI2780), Matériaux céramiques et poudres (DI2744)
  • Unités de recherche UMONS : Science des Matériaux (F502)
  • Instituts UMONS : Institut de Recherche en Science et Ingénierie des Matériaux (Matériaux)
  • Centres UMONS : Ingénierie des matériaux (CRIM)
Texte intégral :

Abstract(s) :

(Anglais) The main technique used in microelectronics to realize passive components of hybrid circuits, combines screen-printing and furnace firing. The main disadvantage of this approach is to require numerous successive heat treatments to fire all the components of the circuits in suitable conditions. Using laser for local heat treatments offers numerous advantages: the treatments can be optimized for each material, the energy consumption is minimized and the whole processing time can be significantly reduced. The topic of our research is the understanding of microstructural and dimensional modifications generated by selective laser treatments (melting, sintering, and crystallization) on thick coatings of material usually encountered in passive components of hybrid circuits. Our final goal is to develop an innovating process to realize bi-dimensional or three-dimensional components by coupling ink-jet printing and selective laser treatments in substitution respectively to serigraphy and heat treatment furnace. Problems to be solved are: i)- the control of the consolidation, densification, microstructure and crystallization of the coatings and ii)- the bond between the coated material and the substrate or between the different layers in the case of multilayer coatings. This article is about the Selective Laser Sintering (SLS) of BaTiO3 coatings and is linked to two other articles: i). Part I – Silver conductor fabrication on glass and alumina substrates and ii). Part III – Melting and crystallization of a piezoelectric glass ceramic. BaTiO3 is the most common material used to realize capacitor because of its high dielectric constant. Capacitors made of this material offer excellent frequency characteristics, high breakdown voltage, high reliability and excellent volumetric efficiency [1]. In the present work, thick coatings were realized by spray deposition on inorganic substrates (glass and alumina). The coatings were then treated by SLS using a YAG-laser with a maximal powder of 10W and a spot size of 40 µm. Scanning parameters (Power %, scan speed and vectorization step) were investigated. The first results show that suitable scanning conditions make possible to obtain uniform and homogeneous BaTiO3 coating exhibiting good bonding with both substrates. The control of the densification of BaTiO3 spray deposited on an alumina substrate coated with a platinum layer is under investigation. A capacitor could be then realized in order to characterize the dielectric properties. [1] J-M. Haussonne, “Céramiques pour l’électronique et l’électrotechnique”, Presses polytechniques et universitaires romandes. Acknowledgement: This research is part of the LASESURF project funded by the EU and the Walloon Region.