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2014-03-09 - Colloque/Présentation - communication orale - Anglais - 2 page(s)

Scheen Gilles, Bassu Margherita, Douchamps Antoine, Zhang Chao, Debliquy Marc , Francis Laurent, "Functionalized macroporous silicon chemiresistor for the miniaturization of hydrogen sensors" in PSST2014 Porous Semiconductors Science and Technology, Alicante, March 9-15 , Alicante, Spain, 2014

  • Codes CREF : Capteurs et périphériques (DI2563)
  • Unités de recherche UMONS : Science des Matériaux (F502)
  • Instituts UMONS : Institut de Recherche en Science et Ingénierie des Matériaux (Matériaux)
  • Centres UMONS : Ingénierie des matériaux (CRIM)
Texte intégral :

Abstract(s) :

(Anglais) In this work, the combination of a new technique for integrating metal electrodes on a macroporous silicon layer and its functionalization is presented for improvement of the hydrogen sensor. Micro-size interdigitat-ed electrodes are used for concentration measurement in the porous layer. To improve the measurement se-lectivity , the porous layer surface is functionalized by means of Pd nanoparticules. Two different function-alization techniques are presented: electroless plating and precipitation. Measurements in H2/Air atmos-phere show a sensitivity of the sensor at different hydrogen concentrations.