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2020-08-03 - Article/Dans un journal avec peer-review - Anglais - 12 page(s)

Michiels Matthieu , Godfroid Thomas , Snyders Rony , Britun N., "A poly-diagnostic study of bipolar high-power magnetron sputtering: role of electrical parameters" in Journal of Physics: D Applied Physics, 53, 43, https://doi.org/10.1088/1361-6463/aba01e

  • Edition : Institute of Physics Publishing (United Kingdom)
  • Codes CREF : Physique des surfaces (DI1265), Chimie des solides (DI1316), Physique des plasmas (DI1233), Sciences exactes et naturelles (DI1000)
  • Unités de recherche UMONS : Chimie des interactions plasma-surface (S882)
  • Instituts UMONS : Institut de Recherche en Science et Ingénierie des Matériaux (Matériaux)
  • Centres UMONS : Centre d’Innovation et de Recherche en Matériaux Polymères (CIRMAP)
Texte intégral :

Abstract(s) :

(Anglais) Ion acceleration in a bipolar high-power impulse magnetron sputtering discharge working with Ar gas and using a Ti cathode has been investigated. The multiple discharge diagnostic approaches have been implemented, including the target and substrate current probe measurements, mass spectrometry and laser-induced fluorescence. In particular, the current waveforms were analysed in detail, showing the particularities of the current evolution during the negative (plasma) and positive voltage pulses. It is shown that the substrate current during the positive voltage pulse reveals two peaks, corresponding, as suggested, to two groups of the positive ions repulsed from the cathode by the applied positive potential. These observations correlate well with the mass spectrometry measurements as well as with the two-dimensional ion density mapping performed for several discharge conditions by laser-induced fluorescence imaging technique.