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2017-05-28 - Colloque/Présentation - communication orale - Anglais - 2 page(s)

Marchand Nicolas, Walewyns Thomas, Lahem Driss, Debliquy Marc , Francis Laurent, "Ultra-low-power chemiresistive microsensor array in a back-end CMOS process towards selective volatile compounds detection and IoT applicationsUltra-low-power chemiresistive microsensor array in a back-end CMOS process towards selective volatile compounds detection and IoT applications" in International Symposium on Olfaction and Electronic Nose (ISOEN) , Montréal, Canada, 2017

  • Codes CREF : Capteurs et périphériques (DI2563)
  • Unités de recherche UMONS : Science des Matériaux (F502)
  • Instituts UMONS : Institut de Recherche en Science et Ingénierie des Matériaux (Matériaux)
  • Centres UMONS : Ingénierie des matériaux (CRIM)

Abstract(s) :

(Anglais) We describe an ultra-low-power volatile compounds microsensor array towards increased selectivity and sensitivity. The chemiresistive transducers are 100 nm-thick interdigitated gold microelectrodes coated with polypyrrolebased polymer. Two sensors arrays were implemented with respectively 3 x 3 and 2 x 2 pixels², showing a surface per pixel down to 400 x 200 μm². The fabrication is fully CMOScompatible and the polymer coating is performed at wafer level by electropolymerization, using a differential pulse method from 1.1 to 1.5 V. The polymer film thickness varies from 1.2 to 1.5 μm. Looking at ammonia detection, a sensitivity up to 80 % at 5 ppm in nitrogen is achieved, while consuming below 20 μW continuously. Finally, temperature and humidity effects are analyzed at 25 and 45 °C, from 45 to 95 % RH. Such devices are very promising for remote environmental monitoring applications requiring low-cost low-power sensors associated with dedicated electronics.